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INVESTIGATION OF THE PLASMA CHARACTERISTICS BY VARYING THE PRESSURE AND GAS TEMPERATURE INSIDE THE PECVD CHAMBER

By: KHANNA (SAGAR).
Material type: materialTypeLabelBookPublisher: DELHI TECHNOLOGICAL UNIVERSITY 2018Description: 45.Subject(s): APPLIED PHYSICSDDC classification: 620.5 KHA Dissertation note: M.TECH 2018 PROF. S.C.SHARMA
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Elec. Thesis & Dissertation Elec. Thesis & Dissertation Delhi Technological University

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620.5 KHA (Browse shelf) Not for loan TD-4291

M.TECH 2018 PROF. S.C.SHARMA

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